No. 99MBC094A
1-1
1 INTRODUCTION
This chapter describes the maintenance and inspecton of the Laser
Scan Micrometer (LSM) measuring unit.
1.1 Outline
The Laser Scan Micrometer is a high-precision laser measuring system that performs
non-contact dimensional measurements with a high-speed scanning laser beam.
With non-contact measurement capability, this system features high-precision
measurement of workpieces that are difficult for conventional measuring systems to
measure, including hot workpieces, brittle or elastic workpieces, workpieces that must be
kept free from contamination, and soft workpieces subject to the measuring force.
1.2 Introduction
This measuring unit is used with the display unit of the LSM-6200. Since this User’s
Manual primarily describes the specifications of the measuring unit, please refer to the
User’s Manual of the LSM-6200 for details about connection with a display unit, functions,
and measurement procedures.
The measuring unit is provided with a shutter or cap on the emission unit and reception
unit. Laser equipment has such safety precautions.
During measurement: Open the shutter by sliding it as shown in the below left diagram
of fig-a), or remove the lens cap as shown in the below left diagram of fig-b).
During no-measurement: Close the shutter by sliding it as shown in the below right
diagram of fig-a), or mount the lens cap as shown in the below right diagram of fig-b).
1
Shutte
Shutter
window
Laser beam
window
Laser beam
window
Lens cap
a) LSM-501S/503S/506S/512S/516S
Open Close
b) LSM-500S
Open Close
