Filter
Top Products
Teledyne API M452 Ozone Sensor Instruction Manual, 02852, Rev. E
1-1
1 Product Descriptions
1.1 M452 Process Ozone Sensor
The Teledyne API M452 is a microprocessor-based sensor for measuring
the concentration of gaseous ozone in processes such as semiconductor
wafer fabrication, water treatment, and ozone research. The M452 can be
used as a full flow process sensor or as a sensor to monitor a small flow of
gas diverted from a process stream.
The M452 features a standard 0-5 volt analog signal for reporting process
concentration as well as 4 digital status outputs for sensor diagnostics. A
bi-directional serial interface is also provided for computer control.
The M452 operates from an external +15 vdc power source.
1.2 M452 High Purity Process Ozone Sensor
The M452A High Purity Process Ozone Sensor includes a 316L manifold
with a 10Ra finish. ¼” VCR face seal fittings are standard.