3.1LSM-500S
（1）Specifications
MODEL
LSM-500S
Order No.
544-532
Applicable display unit
LSM-6200
Laser scanning range
mm(inch)
Up to 12.5(.49”)
(Detecting regions is limited to about 10 mm (.4”) approx.)
Measuring range
mm(inch)
0.005 to 2 (.0002” to .08”)
0.1 to 2 (.004” to .08”)[*1]
Resolution
µm(inch) 0.01 to 10 (.000001” to .0005”) [Selectable]
Repeatability[*2] µm(inch)
±0.03 (±.0000012”) [*3]
Linearity [*2] µm(inch)
±0.3 (±.000012”) [*4]
Positional error [*2][*5] µm(inch)
±0.4 (±.000016”)
Measuring region
mm(inch)
1 × 2 (.04” × .08”)
[Optical axis direction × Scanning direction]
Number of scans for averaging scan 16 to 2048[*6]
Laser classification
Class 2 (Max. Output:1.3mW with a scanning laser, semiconductor laser:
wavelength 650nm)
Number of laser scans /sec 3200
Laser scanning rate m/sec (inch/sec)
76(2992”/sec)
Protection level IP64
Temperature 0 °C to 40 °C
Humidity 35 %RH to 85 %RH [without condensation]
Operation environment
Altitude 2000 m or less
Temperature -15 °C to 55 °C
Storage environment
Humidity
35 %RH to 85 %RH [without condensation]
[*1]：Measuring range available when set to “No extra-fine wire measurement” or “Edge specification” in the basic setup
mode.
[*2]：Environment for accuracy validation: 20
°C ± 1°C temperature; 50% ± 10% humidity.
[*3]：The value of ±2σ with a 2mm-diameter gage has been measured for two minutes with a measurement interval of
0.32 seconds, where σ is the standard deviation.
[*4]：The value of measurements in the center of the measurement region.
[*5]：Error due to the positional shift of the workpiece in the optical axis direction or scanning direction.
[*6]：Averaging scans between 1 and 8 times can be made if “No extra-fine wire measurement” is specified in the basic
setup mode. The measuring range, however, is limited to 0.1 mm to 2 mm in this case.
（2）Standard accessories
Part No. Item Qt.
―
ID unit [*7] 1
02AGN770A Signal cable (5m / 16ft) 1
99MBC094A User’s manual 1
[*7]：The ID unit stores data unique to the measuring unit. A replacement ID unit is available at extra cost.
（3）Optional accessories
Order No. Item
02AGD110
Calibration gages set φ 0.1 mm φ 2 mm
02AGD200 Guide pulley unit for LSM-500H (also available for LSM-500)
02AGD220 Air-blow unit for LSM-500H (also available for LSM-500)
02AGN780A/B Extension signal cables ( 5m/10m)(16ft/32ft)[*8] [*9]
[*8]：The signal cable can be extended up to 20 m(64ft).
[*9]：The length of the signal cable other than the standard, may affect the accuracy .
No. 99MBC094A
3-2
