Agilent Technologies 16440A SMU Sander User Manual


 
22 Agilent 16440A Users Guide, Edition 4
User's Guide
Specifications
Supplemental Information
The following reference data is specified at 23 ± 5 °C (73 ± 9 °F) and 50 % relative
humidity.
SMU channel
Leakage current less than 100 fA at 100 V
Residual resistance 0.2 W typical
Stray capacitance
(force common) 0.3 pF typical at 1 MHz
Stray capacitance
(force guard) 15 pF typical at 1 MHz
Stray capacitance
(guard common) 130 pF typical at 1 MHz
PGU channel
Residual resistance 3.4 W
Stray capacitance
(relay off) 5 pF typical
Stray capacitance
(open) 700 pF typical (at 1 MHz Vin - Vout = 0 V)
Signal transfer
characteristics Overshoot < 5 % of pulse amplitude (at 20 ns leading
and trailing time, 50 W pulse generator source
impedance, 50 pF 1 MW in parallel load)