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2000 Sep 06 21
Philips Semiconductors
Magnetoresistive sensors for
magnetic field measurement
General
APPENDIX 3: SENSOR LAYOUT
In Philips’ magnetoresistive sensors, the permalloy strips
are formed into a meander pattern on the silicon substrate.
With the KMZ10 (see Fig 25) and KMZ51 series, four
barber-pole permalloy strips are used while the KMZ41
series has simple elements. The patterns used are
different for these three families of sensors in every case,
the elements are linked in the same fashion toform the four
arms of a Wheatstone bridge. The meander pattern used
in the KMZ51 is more sophisticated and also includes
integrated compensation and flipping coils (see chapter on
weak fields); the KMZ41 is described in more detail in the
chapter on angle measurement.
Fig.25 KMZ10 chip structure.
handbook, full pagewidth
MBC930