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9600 Compressor Description
1-10 P/N 8040540
C
HELIX TECHNOLOGY CORPORATION
-
TI C
RY
OG
EN
ICS
Return Gas Coupling
The Return Gas Coupling returns the helium, which has been cycled
through the cryopump, back to the Compressor. Refer to
CTI-CRYOGENICS Helium Refrigeration System within this section
for more information.
Cooling Water IN
The Cooling Water IN connector provides water to the Compressor from
your facility to cool the Compressor during operation. The connector
thread size is a 1/2 in. female pipe thread. The water must meet the
specifications outlined in Table 1-3. Refer to Section 3 - Installation for
more information on cooling water connections.
Cooling Water OUT
The Cooling Water OUT connector returns the water that has been used to
cool the Compressor to your facility. The connector thread size is a
1/2 in. female pipe thread. Refer to Section 3 - Installation for more
information on cooling water connections.
Cryopump Electrical Outlet
The Cryopump Electrical Outlet provide power to a single On-Board or
Cryo-Torr Cryopump, an On-Board Splitter Box, or a Cryo-Torr Interface.
The Compressor requires the use of an On-Board Splitter Box or
Cryo-Torr Interface for multiple cryopump system connections. Refer to
Table 1-5 for connector pin identification. Refer to Multiple On-Board
Cryopump Connections or Multiple Cryo-Torr Cryopump
Connections within this section for more information.
Table 1-5: Cryopump Electrical Outlet Pin Assignments
Identifier Function
A and B Heater Power - 208 VAC nominal
C Center tap for D and E
D and E 24 VCT @ 4.6 Amps
F-G and G-H Cold Head Voltage Output 130-160 VAC @ 4.5 Amps
J Chassis Ground
KNot Used