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3-16 P/N 8040540
C
HELIX TECHNOLOGY CORPORATION
-
TI C
RY
OG
EN
ICS
Figure 3-9: Alternative Multiple Cryo-Torr Cryopump Installation
CRYOPUMP POWER CABLES
USER REMOTE
(FROM VACUUM SYSTEM)
HELIUM SUPPLY
HELIUM RETURN
WATER
POWER
CRYO-TORR
INTERFACE
REMOTE