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9600 Compressor Installation, Operation, and Maintenance
P/N 8040540 1-1
C
HELIX TECHNOLOGY CORPORATION
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TI C
RY
OG
EN
ICS
Section 1 - 9600 Compressor Description
General
This manual provides the information required to install, operate, and
maintain the CTI-CRYOGENICS 9600 Compressor.
NOTE: All personnel with installation, operation, and maintenance
responsibilities should become familiar with the contents of both the 9600
Compressor Installation, Operation, Maintenance, and appropriate
cryopump manuals to ensure safe, high quality, and reliable system
performance.
Benefits
The 9600 Compressor is a universal compressor that accepts
three-phase 50Hz or 60 Hz power input and provides two-phase or three-
phase 60Hz power output to On-Board or Cryo-Torr Cryopumps.
The 9600 Compressor design eliminates the use of three-phase motor
controllers and/or frequency converters and significantly reduces the
amount of equipment required and cost associated with the Cryopump
power circuit.
CAUTION
Refer to Appendix A to contact the local Customer Support Center for
information on connecting 9600 Compressors to a manifold with other
CTI-CRYOGENICS compressors.
Compressor Configurations
The 9600 Compressor supports either On-Board or Cryo-Torr Cryopumps.
For multiple cryopump installations, an On-Board Splitter Box or Cryo-
Torr Interface can be used for cold head power distribution that reduces
total cable requirements as shown in Figure 1-5 and 1-6.