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Installation
3-10 P/N 8040540
C
HELIX TECHNOLOGY CORPORATION
-
TI C
RY
OG
EN
ICS
Single Cryo-Torr Cryopump Connections
CAUTION
Make sure the Compressor power is OFF before making any
connections to the rear panel.
1. Connect the Supply and Return lines to the 9600 Compressor as
described in Connecting/Disconnecting Helium Flex Lines
within this section.
2. Connect one end of the Cryopump cold head cable to the
CRYOPUMP ELECTRICAL OUTLET on the rear panel of the
Compressor as shown in Figure 3-5. Connect the opposite end of
the cold head cable to the cryopump cold head cable connector as
shown in Figure 3-5.
Figure 3-5: Single Cryo-Torr Cryopump Installation
HELIUM SUPPLY
HELIUM RETURN
WATER
POWER
CRYO-TORR
POWER CABLE
REMOTE