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3-2 P/N 8040540
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HELIX TECHNOLOGY CORPORATION
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ICS
Figure 3-1: 9600 Compressor Installation Flowchart
Supply and Return Water Line Connections
(refer to page 3-3)
Electrical Connections
(refer to page 3-4)
Phase Check
(refer to page 3-6)
Single Cryopump Connections
(refer to page 3-9)
START
Refer to
Section 4 - Operation
END
Single or Multiple
Cryopump
Installation?
Multiple Cryopump Connections
(refer to page 3-11)
Connect/Disconnect Helium Flexlines
(refer to page 3-7)
2Ø or 3Ø Cryopump
Power?
(refer to page 3-7)